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Inverse doping profile analysis for semiconductor quality control
Myers, Joseph Kenneth
Myers, Joseph Kenneth
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Dissertation
Adobe PDF, 1.18 MB
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2009-12
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Dissertation
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Electronic dissertations
Electronic dissertations
Electronic dissertations
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Abstract
Inverse doping pro le problems are linked to inverse conductivity problems under the
assumptions of zero space charge and low injection. Unipolar inverse conductivity problems
are analyzed theoretically via three uniqueness proofs, the rst of which has been
published as a paper in Inverse Problems [34]. Also, optimized numerical methods are
developed for solving the unipolar direct conductivity problem with a piecewise constant
conductivity coe cient. Finally, the unipolar inverse conductivity problem is solved for
inclusions de ned by as many as 9 parameters, or by as many as 120 parameters when an
initial guess for each parameter is known with less than 10% error. Our free boundary
identi cation algorithm produces a sequence of improved approximations in a way that
provides both regularization and accelerated convergence towards the solution.
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Thesis (Ph.D.)--Wichita State University, College of Liberal Arts and Sciences, Dept. of Mathematics and Statistics
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Wichita State University