Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces
Lake-Speers, Melinda A. Preetham Burugupally, Sindhu Hoelzle, David
Lake-Speers, Melinda A.
Preetham Burugupally, Sindhu
Hoelzle, David
Other Names
Location
Time Period
Advisors
Original Date
Digitization Date
Issue Date
2023-12
Type
Article
Genre
Keywords
MEMS,Electrostatic actuator,Curved electrode,Microfluidics,Energy methods
Subjects (LCSH)
Citation
Lake-Speers, M.A., Preetham Burugupally, S., Hoelzle, D. (2023). Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces. Journal of Micromechanics and Microengineering, 33(12). https://doi.org/10.1088/1361-6439/acfa0b.
Abstract
Here, we present a model, design, static and dynamic testing, and analysis of an electrostatic curved electrode actuator in deionized water. The actuator is integrated within a microfluidic device designed for high throughput cell sorting. The actuator shifts the bifurcation point of a Y-shaped microfluidic channel to simultaneously increase the width of one channel while decreasing the width of another channel, thus changing the bias in hydrodynamic resistance between outlet channels. The actuator is modeled as a clamped-roller beam and the static displacement is calculated based on Rayleigh-Ritz energy methods. The model accounts for oxide growth and surface roughness that occurs during fabrication. We observe that modeling a rough contact surface improves the maximum displacement prediction to within less than 20% error from the experimental value. Additionally, the model predicts a release voltage within less than 8% error of the experimental value. We also present dynamic experiments to test the actuator displacement at frequencies from 1 to 4096 Hz and show that the actuator achieves large displacements (>8 µm) at high frequencies (>100 Hz).
Table of Contents
Description
Click on the DOI link to access this article (may not be free).
Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publisher
Institute of Physics
Journal
Book Title
Series
Journal of Micromechanics and Microengineering
v.33 no.12
v.33 no.12
Digital Collection
Finding Aid URL
Use and Reproduction
Archival Collection
PubMed ID
DOI
ISSN
0960-1317