Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces

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Authors
Lake-Speers, Melinda A.
Preetham Burugupally, Sindhu
Hoelzle, David
Advisors
Issue Date
2023-12
Type
Article
Keywords
MEMS , Electrostatic actuator , Curved electrode , Microfluidics , Energy methods
Research Projects
Organizational Units
Journal Issue
Citation
Lake-Speers, M.A., Preetham Burugupally, S., Hoelzle, D. (2023). Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces. Journal of Micromechanics and Microengineering, 33(12). https://doi.org/10.1088/1361-6439/acfa0b.
Abstract

Here, we present a model, design, static and dynamic testing, and analysis of an electrostatic curved electrode actuator in deionized water. The actuator is integrated within a microfluidic device designed for high throughput cell sorting. The actuator shifts the bifurcation point of a Y-shaped microfluidic channel to simultaneously increase the width of one channel while decreasing the width of another channel, thus changing the bias in hydrodynamic resistance between outlet channels. The actuator is modeled as a clamped-roller beam and the static displacement is calculated based on Rayleigh-Ritz energy methods. The model accounts for oxide growth and surface roughness that occurs during fabrication. We observe that modeling a rough contact surface improves the maximum displacement prediction to within less than 20% error from the experimental value. Additionally, the model predicts a release voltage within less than 8% error of the experimental value. We also present dynamic experiments to test the actuator displacement at frequencies from 1 to 4096 Hz and show that the actuator achieves large displacements (>8 µm) at high frequencies (>100 Hz).

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Publisher
Institute of Physics
Journal
Book Title
Series
Journal of Micromechanics and Microengineering
v.33 no.12
PubMed ID
DOI
ISSN
0960-1317
EISSN