Performance evaluation of a curved electrode actuator fabricated without gold/chromium conductive layers

No Thumbnail Available
Authors
Burugupally, Sindhu Preetham
Mangels, Jordan A.
Advisors
Issue Date
2018-08
Type
Article
Keywords
MEMS , Stimulation , Cells
Research Projects
Organizational Units
Journal Issue
Citation
Burugupally, S. & Mangels, J.A. Microsyst Technol (2018) 24: 3479
Abstract

Curved electrode actuators displace on the order of a biological cell diameter at low actuation voltages, making them a potential candidate for probing and micromanipulation of cells in an underwater, closed microenvironment. Here, a closed microenvironment is formed by bonding a Polydimethylsiloxane-based cap-like structure to the actuator; however, the presence of Au/Cr conductive layers on the actuator reduce the available silicon surface area of the actuator-resulting in poor adhesion. Therefore, we propose to fabricate the actuators without these conductive layers. In this paper, we demonstrate the absence of these layers has a minimal effect on the actuator's peak-to-peak displacement and force. The actuator achieves the following performance metrics: large displacement (1-10 mu m) and force (1-21.5 mu N) range; broad frequency range (1-500 Hz); and low actuation voltages (0-8 V) in viscous media that are necessary for cell probing and micromanipulation applications.

Table of Contents
Description
Click on the DOI link to access the article (may not be free).
Publisher
Springer Berlin Heidelberg
Journal
Book Title
Series
Microsystem Technologies;v.24:no.8
PubMed ID
DOI
ISSN
0946-7076
EISSN