• Login
    View Item 
    •   Shocker Open Access Repository Home
    • Engineering
    • Mechanical Engineering
    • ME Research Publications
    • View Item
    •   Shocker Open Access Repository Home
    • Engineering
    • Mechanical Engineering
    • ME Research Publications
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    An x-ray diffraction method for measuring thicknesses of epitaxial thin films

    Date
    1989-12
    Author
    Chaudhuri, J.
    Shah, S.
    Harbison, J. P.
    Metadata
    Show full item record
    Citation
    Chaudhuri, J.; Shah, S.; Harbison, J. P.; , "An x-ray diffraction method for measuring thicknesses of epitaxial thin films," Journal of Applied Physics , vol.66, no.11, pp.5373-5375, Dec 1989 doi: 10.1063/1.343732
    Abstract
    An x-ray diffraction technique capable of measuring the thicknesses of epitaxial thin films with high precision is described. The advantages of this method are that it is nondestructive, straightforward, and rapidly performed. The equations, based on the kinematical theory of x-ray diffraction and the mosaic crystal model, were developed. As an example of the application of this method, thicknesses of AlxGa1-xAs thin films on GaAs were determined. The integrated reflected intensities from the film and the substrate were obtained using an x-ray double-crystal diffractometer. Excellent agreement between the results from x-ray measurements and reflection high-energy electron diffraction oscillation data was obtained.
    Description
    The full text of this article is not available on SOAR. WSU users can access the article via IEEE Xplore database licensed by University Libraries: http://libcat.wichita.edu/vwebv/holdingsInfo?bibId=1045954
    URI
    http://dx.doi.org/10.1063/1.343732
    http://hdl.handle.net/10057/4064
    Collections
    • ME Research Publications

    Browse

    All of Shocker Open Access RepositoryCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsBy TypeThis CollectionBy Issue DateAuthorsTitlesSubjectsBy Type

    My Account

    LoginRegister

    Statistics

    Most Popular ItemsStatistics by CountryMost Popular Authors

    DSpace software copyright © 2002-2023  DuraSpace
    DSpace Express is a service operated by 
    Atmire NV