Browsing Mechanical Engineering by Author "Thokala, R."

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X-ray double crystal characterization of single crystal epitaxial aluminum nitride thin films on sapphire, silicon carbide and silicon substrates

Chaudhuri, J.; Thokala, R.; Edgar, J. H.; Sywe, B. S. (IEEE, 1995-06-01)

A detailed double crystal x-ray diffractometry study of epitaxial AlN thin films grown on sapphire, silicon and silicon carbide substrates was carried out to compare the structure, residual stress and defect concentration ...