Browsing Mechanical Engineering by Author "Harbison, J. P."

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An x-ray diffraction method for measuring thicknesses of epitaxial thin films

Chaudhuri, J.; Shah, S.; Harbison, J. P. (IEEE, 1989-12)

An x-ray diffraction technique capable of measuring the thicknesses of epitaxial thin films with high precision is described. The advantages of this method are that it is nondestructive, straightforward, and rapidly ...