text

Determination of thickness of multiple layer thin films by an x-ray-diffraction technique

SOAR Repository

Show simple item record

dc.contributor.author Chaudhuri, J. en_US
dc.contributor.author Hashmi, F. en_US
dc.date.accessioned 2011-12-20T23:37:43Z
dc.date.available 2011-12-20T23:37:43Z
dc.date.issued 1994-10-01 en_US
dc.identifier.citation Chaudhuri, J.; Hashmi, F.; , "Determination of thickness of multiple layer thin films by an x-ray-diffraction technique," Journal of Applied Physics , vol.76, no.7, pp.4454-4456, Oct 1994 doi: 10.1063/1.357275 en_US
dc.identifier.issn 0021-8979 en_US
dc.identifier.uri http://dx.doi.org/10.1063/1.357275 en_US
dc.identifier.uri http://hdl.handle.net/10057/4062
dc.description The full text of this article is not available on SOAR. WSU users can access the article via IEEE Xplore database licensed by University Libraries: http://libcat.wichita.edu/vwebv/holdingsInfo?bibId=1045954 en_US
dc.description.abstract An x-ray-diffraction method for determining the thickness of multiple layer thin films grown on a single-crystal substrate is presented. The equations, based on the kinematical theory of x-ray diffraction and the mosaic crystal model, were developed. As an example of the application of the method, thicknesses of a double heterostructure system, namely AlAs/AlGaAs/GaAs, were determined. Good agreement was obtained between the results from x-ray measurement and scanning electron microscopy data, demonstrating the high precision of this technique. en_US
dc.language.iso en_US en_US
dc.publisher IEEE en_US
dc.relation.ispartofseries Journal of Applied Physics , vol.76, no.7, pp.4454-4456 en_US
dc.title Determination of thickness of multiple layer thin films by an x-ray-diffraction technique en_US
dc.type Article en_US
dc.description.version Peer reviewed article en_US
dc.rights.holder © IEEE, 1994 en_US

Files in this item

Files Size Format View

There are no files associated with this item.

This item appears in the following Collection(s)

Show simple item record

Search SOAR


Advanced Search

Browse

My Account

Statistics