Inverse doping profile analysis for semiconductor quality control

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dc.contributor.advisor	Isakov, Victor, 1947-
dc.contributor.author	Myers, Joseph Kenneth
dc.date.accessioned	2010-09-23T15:29:00Z
dc.date.available	2010-09-23T15:29:00Z
dc.date.issued	2010-04-23
dc.identifier.citation	Myers, Joseph K. (2010). Inverse doping profile analysis for semiconductor quality control. -- In Proceedings: 6th Annual Symposium: Graduate Research and Scholarly Projects. Wichita, KS: Wichita State University, p. 155-156	en
dc.identifier.uri	http://hdl.handle.net/10057/3225
dc.description	Paper presented to the 6th Annual Symposium on Graduate Research and Scholarly Projects (GRASP) held at the Hughes Metropolitan Complex, Wichita State University, April 23, 2010.	en
dc.description	Research completed at Department of Mathematics and Statistics, College of Liberal Arts and Sciences	en
dc.description.abstract	Inverse doping profile problems are linked to inverse conductivity problems under the assumptions of zero space charge and low injection. Unipolar inverse conductivity problems are analyzed theoretically via three uniqueness proofs. Optimized numerical methods are developed for solving the unipolar direct conductivity problem with a piecewise constant conductivity coefficient. Finally, the unipolar inverse conductivity problem is solved for inclusions defined by as many as 9 entirely unknown parameters, or by as many as 120 parameters when an initial guess for each parameter is known with less than 10% error. Our free boundary identification algorithm produces a sequence of improved approximations in a way that provides both regularization and accelerated convergence towards the solution.	en
dc.format.extent	67314 bytes
dc.format.extent	1843 bytes
dc.format.mimetype	application/pdf
dc.format.mimetype	text/plain
dc.language.iso	en_US	en
dc.publisher	Wichita State University. Graduate School	en
dc.relation.ispartofseries	GRASP	en
dc.relation.ispartofseries	v.6	en
dc.title	Inverse doping profile analysis for semiconductor quality control	en
dc.type	Conference paper	en